TY  - JOUR

T1  - Internal structure of TiAlN/VN coating deposited on sharp edges by ion-assisted physical vapor deposition

JO  - J VAC SCI TECHNOL A

PY  - 2004/07/01

AU  - Macak EB

AU  - Rodenburg JM

ED  - 

DO  - DOI: 10.1116/1.17693911

VL  - 22

IS  - 4

SP  - 1195

EP  - 1199

Y2  - 2024/09/19

ER  -