TY  - JOUR

T1  - Plasma-surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part I: Edge-related effects and their influence on coating morphology and composition

JO  - J APPL PHYS

PY  - 2003/09/01

AU  - Macak EB

AU  - Munz WD

AU  - Rodenburg JM

ED  - 

DO  - DOI: 10.1063/1.1597755

VL  - 94

IS  - 5

SP  - 2829

EP  - 2836

Y2  - 2024/09/19

ER  -