@article{article, title  = {{Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates}},

 publisher = {{IOP Publishing}},

 url = {{}},

 year = {{2022}},

 month = {{2}},

 author = {{Ovenden C and Farrer I and Skolnick MS and Heffernan J}},

 doi = {{10.1088/1361-6641/ac3f20}},

 volume = {{37}},

 journal = {{Semiconductor Science and Technology}},

 issue = {{2}},

 note = {{Accessed on 2024/09/20}}}