@inproceedings{inproceedings, title  = {{Ptychography applied to optical metrology}},

 url = {{}},

 year = {{2012}},

 month = {{1}},

 author = {{Claus D and Robinson DJ and Chetwynd DG and Shuo Y and Pike WT and Rodenburg JM}},

 doi = {{10.1117/12.977959}},

 volume = {{8413}},

 journal = {{SPECKLE 2012: V INTERNATIONAL CONFERENCE ON SPECKLE METROLOGY}},

 note = {{Accessed on 2024/09/20}}}