TY  - CONF

T1  - A new Gaussian process-based approach for uncertainty propagation in surface metrology profile parameters estimation

JO  - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

PY  - 2019/01/01

AU  - Obajemu O

AU  - Mahfouf M

AU  - McLeay TE

AU  - Jiang X

AU  - Scott PJ

AU  - Kadirkamanathan V

ED  - 

SP  - 520

EP  - 523

Y2  - 2024/09/20

ER  -