@inproceedings{inproceedings, title  = {{Reduction of dark current and unintentional background doping in InGaAsN photodetectors by ex situ annealing}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Tan SL and Tan LJJ and Goh YL and Zhang S and Ng JS and David JPR and Marko IP and Allam J and Sweeney SJ and Adams AR}},

 doi = {{10.1117/12.853912}},

 isbn = {{9780819481993}},

 volume = {{7726}},

 journal = {{Proceedings of SPIE - The International Society for Optical Engineering}},

 note = {{Accessed on 2024/09/19}}}