TY  - CONF

T1  - Photolithography on grossly non-planar substrates

JO  - Proceedings of the Seventh IEEE CPMT Conference on High Density Microsystem Design, Packaging and Failure Analysis (HDP'05)

PY  - 2005/01/01

AU  - Williams GL

AU  - McWilliam R

AU  - Maiden A

AU  - Purvis A

AU  - Ivey PA

AU  - Seed NL

ED  - 

SP  - 442

EP  - 446

Y2  - 2024/09/20

ER  -