@inproceedings{inproceedings, title  = {{Photolithography on grossly non-planar substrates}},

 url = {{}},

 year = {{2005}},

 month = {{1}},

 author = {{Williams GL and McWilliam R and Maiden A and Purvis A and Ivey PA and Seed NL}},

 journal = {{Proceedings of the Seventh IEEE CPMT Conference on High Density Microsystem Design, Packaging and Failure Analysis (HDP'05)}},

 pages = {{442-446}},

 note = {{Accessed on 2024/09/20}}}