@inproceedings{inproceedings, title  = {{A photolithographic process for grossly non-planar substrates - art. no. 69212E}},

 url = {{}},

 year = {{2008}},

 month = {{1}},

 author = {{Williams GL and McWilliam RP and Toriz-Garcia J and Curry R and Maiden A and Seed NL and Purvis A and Ivey PA}},

 volume = {{6921}},

 journal = {{EMERGING LITHOGRAPHIC TECHNOLOGIES XII, PTS 1 AND 2}},

 pages = {{E9212-E9212}},

 note = {{Accessed on 2024/09/20}}}