@article{article, title = {{Dual wavelength optical metrology using ptychography}}, url = {{}}, year = {{2013}}, month = {{3}}, author = {{Claus D and Robinson DJ and Chetwynd DG and Shuo Y and Pike WT and De J Toriz Garcia JJ and Rodenburg JM}}, doi = {{10.1088/2040-8978/15/3/035702}}, volume = {{15}}, journal = {{Journal of Optics (United Kingdom)}}, issue = {{3}}, note = {{Accessed on 2024/09/20}}}