TY - JOUR T1 - Development of a cosputter-evaporation chamber for Fe-Ga films JO - J VAC SCI TECHNOL A PY - 2008/07/01 AU - Morley NA AU - Yeh SL AU - Rigby S AU - Javed A AU - Gibbs MRJ ED - DO - DOI: 10.1116/1.2924416 VL - 26 IS - 4 SP - 581 EP - 586 Y2 - 2024/09/19 ER -