TY - JOUR T1 - Reactive sputtering: A method for controlling the stoichiometry and energy level structure of amorphous molybdenum oxide films JO - Materials Research Society Symposium Proceedings PY - 2012/01/01 AU - Griffin J AU - Buckley AR ED - DO - DOI: 10.1557/opl.2012.1441 VL - 1443 SP - 34 EP - 40 Y2 - 2024/09/19 ER -