TY  - CONF

T1  - Photolithography on three dimensional substrates

JO  - Proceedings - Electronic Components and Technology Conference

PY  - 2006/01/01

AU  - Ivey P

AU  - McWilliam R

AU  - Maiden A

AU  - Williams G

AU  - Purvis A

AU  - Seed L

ED  - 

DO  - DOI: 10.1109/ECTC.2006.1645660

SN  - 9781424401529

VL  - 2006

SP  - 283

EP  - 288

Y2  - 2024/09/20

ER  -