TY  - JOUR

T1  - Manufacturability of split-gate transistor devices—initial results

JO  - Semiconductor Science and Technology

PY  - 2006/04/01

AU  - Yang Q-Z

AU  - Jones GAC

AU  - Kelly MJ

AU  - Beere H

AU  - Farrer I

ED  - 

DO  - DOI: 10.1088/0268-1242/21/4/024

PB  - IOP Publishing

VL  - 21

IS  - 4

SP  - 558

EP  - 564

Y2  - 2024/09/20

ER  -