TY  - JOUR

T1  - Plasma-surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners

JO  - J APPL PHYS

PY  - 2003/09/01

AU  - Macak EB

AU  - Munz WD

AU  - Rodenburg JM

ED  - 

DO  - DOI: 10.1063/1.1597756

VL  - 94

IS  - 5

SP  - 2837

EP  - 2844

Y2  - 2024/09/19

ER  -